Metrology & Instrumentation
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Optical Profilers
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Nanotheater
Veeco Probes
 
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Diamond-Like Carbon
Ion Beam Deposition
Ion Beam Etch
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MBE Components
MBE Sources
MBE Systems
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Solutions for a nanoscale world.™
 

Process Equipment : Ion Beam Etch

NEXUS Oxidation Module

NEXUS Oxidation Module

Veeco's NEXUS Oxidation modules provide versatility for formation of ultra-thin nano oxide and tunnel barrier layers.  Natural Oxidation, Remote Plasma and Ion Beam Oxidation techniques allow the oxidation process to be optimized for the application.